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Northwest Missouri State University


Field Emission Scanning Electron Microscopy (FE-SEM)

Field Emission Scanning Electron Microscopy (FE-SEM)

The scanning electron microscope (SEM) uses a focused beam of high-energy electrons to generate a variety of signals at the surface of solid specimens. The signals that derive from electron-sample interactions reveal information about the sample including external morphology (texture), chemical composition, and crystalline structure and orientation of materials making up the sample. Application includes cross section analyses for gate widths, gate oxides, film thicknesses, and construction details of semiconductor device, coating thickness and structure uniformity determination of samples small contamination feature geometry and elemental composition measurement. The SEM has very high magnification capability up to 1,000,000x. Magnification depends on specimen types. The majority of the applications can be conducted up to 500,000x.